Radio-Frequency Plasma Treatment and Thermal Annealing in Implanted Si Raman Study
Artamonov, V. V. ; Lysenko, V. S. ; Nazarov, A. N. ; Nechiporuk, B. D. ; Strelchuk, V. V. ; Valakh, M. Ya
Physica status solidi. A, Applied research, 1990-08, Vol.120 (2), p.475-484
Texto completo disponível