Monoclinic B-phase erbium sesquioxide (Er 2O 3) thin films by filtered cathodic arc deposition

Adelhelm, Christoph ; Pickert, Thomas ; Balden, Martin ; Rasinski, Marcin ; Plocinski, Tomasz ; Ziebert, Carlos ; Koch, Freimut ; Maier, Hans

Scripta materialia, 2009-10, Vol.61 (8), p.789-792 [Periódico revisado por pares]

Elsevier Ltd

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