Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions

Stephen M Rossnagel; J. J Cuomo; William D Westwood 1937- (William Dickson)

Park Ridge, N.J., U.S.A. Noyes Publications c1990

Localização: EPELM - Esc. Politécnica-Bib Eng Elet., Mec. e Naval    (537.52 H191 ) e outros locais(Acessar)