Selective Etching of Silicon in Preference to Germanium and Si 0.5 Ge 0.5

Ahles, Christopher F ; Choi, Jong Youn ; Wolf, Steven ; Kummel, Andrew C

ACS applied materials & interfaces, 2017-06, Vol.9 (24), p.20947-20954 [Periódico revisado por pares]

United States

Texto completo disponível