Spatial distributions of ion-species in a large-volume inductively coupled plasma source

Okuji, S ; Sakudo, N ; Hayashi, K ; Okada, M ; Onogawa, T ; Maesaka, T ; Nishiyama, Y ; Komatsu, K ; Toyoda, K ; Yashima, S ; Ishida, T ; Awazu, K

Surface & coatings technology, 2001-02, Vol.136 (1), p.102-105 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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