Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators

Le, Ha Vu ; Gouiffes, Michele ; Parrain, Fabien ; Bosseboeuf, Alain ; Zavidovique, Bertrand

Proceedings of SPIE, the International Society for Optical Engineering, 2007, Vol.6696, p.66962D-66962D-12

Bellingham, Wash: SPIE

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