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Numerical simulation of an inductively coupled discharge using an Eulerian Vlasov code

Shoucri, M ; Matte, J P ; Côté, A

Journal of physics. D, Applied physics, 2003-09, Vol.36 (17), p.2083-2088 [Periódico revisado por pares]

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Título:
Numerical simulation of an inductively coupled discharge using an Eulerian Vlasov code
Autor: Shoucri, M ; Matte, J P ; Côté, A
Assuntos: Exact sciences and technology ; Fokker-Planck equation ; Fokker-plank and vlasov equations ; Magnetohydrodynamic and fluid equation ; Physics ; Physics of gases, plasmas and electric discharges ; Physics of plasmas and electric discharges ; Plasma simulation
É parte de: Journal of physics. D, Applied physics, 2003-09, Vol.36 (17), p.2083-2088
Notas: ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
Descrição: The physics of an inductively coupled discharge, with the fully nonlinear electron and ion dynamics, is simulated with a kinetic Eulerian Vlasov code. By calculating self-consistently the electrostatic potential evolution on the wave timescale, important insight is gained into the generation of the longitudinal electrostatic field and currents at the second harmonic of the applied RF field, and on the oscillations of the different macroscopic quantities in response to this applied RF field. The generated second harmonic currents are more pronounced at lower frequency, in agreement with experimental observations.
Editor: Bristol: IOP Publishing
Idioma: Inglês

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