Formation of nickel monosilicide onto (100) silicon wafer surfaces
Ronaldo Willian Reis Sebastião Gomes dos Santos Filho 1962-; Armando Antonio Maria Laganá 1952-; Ioshiaki Doi; Jacobus Willibrordus Swart 1950-
Morimoto, N.I.; Ribas, R.P.; Verdonck, P.B Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002Pennington The Electrochemical Society 2002
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