Comprehensive Study on the Kinetic Formation of the Orthorhombic Ferroelectric Phase in Epitaxial Y‑Doped Ferroelectric HfO2 Thin Films

Tashiro, Yuki ; Shimizu, Takao ; Mimura, Takanori ; Funakubo, Hiroshi

ACS applied electronic materials, 2021-07, Vol.3 (7), p.3123-3130 [Periódico revisado por pares]

American Chemical Society

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