Idioma:

Laser microfabrication thin film processes and lithography

Daniel J Ehrlich; Jeffrey Y Tsao

Localização: IFSC - Inst. Física de São Carlos (535.581 E33L )(Acessar)

Título:
Laser microfabrication thin film processes and lithography
Autor: Daniel J Ehrlich; Jeffrey Y Tsao
Assuntos: Lasers -- Industrial applications; Thin film devices -- Design and construction; Microlithography; Microfabrication; LASER
Notas: Includes bibliographies and index
Descrição: Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu -- Laser-stimulated molecular processes on surfaces / T.J. Chuang -- Spectroscopy and photochemistry of gases, adsorb ates, and liquids / M. Rothschild -- Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao -- Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao -- Laser etching / John J. Ritsko -- Laser deposition : energetics and chemical kinetics / R.L. Jackson ... [et al.] -- Laser deposition : experimental approaches / J. Haigh and M.R. Aylett -- Epitaxy / S.J.C. Irvine -- Doping and oxida tion / Ian W. Boyd
Editor: Boston Academic Press
Data de criação/publicação: c1989
Formato: xii, 587 p. ill. 24 cm.
Idioma: Inglês

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