Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
Abadias, Grégory ; Chason, Eric ; Keckes, Jozef ; Sebastiani, Marco ; Thompson, Gregory B. ; Barthel, Etienne ; Doll, Gary L. ; Murray, Conal E. ; Stoessel, Chris H. ; Martinu, Ludvik
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2018-03, Vol.36 (2) [Periódico revisado por pares]United States: American Vacuum Society
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