Characterization of SF6 plasmas by RF electrical measurements

Marcelo Bento Pisani Patrick Bernard Verdonck 1958-

Morimoto, N.I.; Ribas, P.R.; Verdonck, P.B., eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002

Pennington The Electrochemical Society 2002

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