An experimental study of microarea analysis of insulators by secondary ion mass spectrometry using charge compensation

Fan, Chui‐zhen ; Chen, Xue‐kang ; Yu, Zhen‐jiang

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1987-07, Vol.5 (4), p.1271-1274 [Periódico revisado por pares]

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