(1011) preferential orientation of polycrystalline 'AL''N' grown on 'SI''O' IND. 2'/'SI' wafers by reactive sputter magnetron technique

Juan Burgi Javier Garcia Molleja; Raul Bolmaro; Mattia Piccoli; Edoardo Bemporad; Jorge Feugeas; Aldo Felix Craievich

EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS Les Ulis Cedex A v. 74, n. 1, p. 10301, abr.2016

Les Ulis Cedex A 2016

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