SiNx coatings deposited by reactive high power impulse magnetron sputtering: Process parameters influencing the residual coating stress

Schmidt, S. ; Hänninen, T. ; Wissting, J. ; Hultman, L. ; Goebbels, N. ; Santana, A. ; Tobler, M. ; Högberg, H.

Journal of applied physics, 2017-05, Vol.121 (17) [Periódico revisado por pares]

Melville: American Institute of Physics

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