Structural, electrical, and mechanical properties of nc-TiC∕a-SiC nanocomposite thin films

Eklund, P. ; Emmerlich, J. ; Högberg, H. ; Wilhelmsson, O. ; Isberg, P. ; Birch, J. ; Persson, P. O. Å. ; Jansson, U. ; Hultman, L.

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2005-11, Vol.23 (6), p.2486-2495 [Periódico revisado por pares]

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