Texture and Stress Evolution in HfN Films Sputter-Deposited at Oblique Angles
Abadias, Grégory ; Anğay, Fırat ; Mareus, Rubenson ; Mastail, Cédric
Coatings (Basel), 2019-11, Vol.9 (11), p.712
[Periódico revisado por pares]
Basel: MDPI AG
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