Papers from the 21st International Vacuum Nanoelectronics Conference (IVNC) : 13-17 July 2008, Wroclaw, Poland

International Vacuum Nanoelectronics Conference (21st : 2008 : Wroclaw, Poland) J. A Dziuban (Jan A.); American Vacuum Society.; Raith GmbH Germany.; Politechnika Wroc±awska.; International Conference on Nanoscience and Technology

Journal of vacuum science & technology. B, Microelectronics and nanometer structures. 2nd ser., v. 27, no. 2 (Mar.Apr. 2009), p. 686-777 (DLC) 94657460 (OCoLC)23276603

New York : Published by AVS through the American Institute of Physics 2009

Localização: IF - Instituto de Física    (J.Vac.Sci.Technol.B 2nd ser. v )(Acessar)