Papers from the 17th Workshop on Dielectrics in Microelectronics : 25 - 27 June 2012, Dresden, Germany ; [WoDiM]
Workshop on Dielectrics in Microelectronics (17 : 2012 : Dresden) Volkhard Beyer
New York : American Inst. of Physics 2013
Localização: IF - Instituto de Física (J.Vac.Sci.Technol.B v.31 n.1 2nd series 2013 )(Acessar)