Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

Kurz, Nicolas ; Ding, Anli ; Urban, Daniel F. ; Lu, Yuan ; Kirste, Lutz ; Feil, Niclas M. ; Žukauskaitė, Agnė ; Ambacher, Oliver

Journal of applied physics, 2019-08, Vol.126 (7) [Periódico revisado por pares]

Melville: American Institute of Physics

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