Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films
Wanderla Luis Scopel Antonio Jose Roque da Silva; Walter M Orellana; Rogerio Junqueira Prado; Márcia Carvalho de Abreu Fantini; Adalberto Fazzio; Inés Pereyra 1947-
Physical Review B Woodbury v. 68, n. 15, p. 155332/1-155332/6, 2003Woodbury 2003
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