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Structure zone model for extreme shadowing conditions

Mukherjee, S. ; Gall, D.

Thin solid films, 2013-01, Vol.527, p.158-163 [Periódico revisado por pares]

Amsterdam: Elsevier B.V

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Título:
Structure zone model for extreme shadowing conditions
Autor: Mukherjee, S. ; Gall, D.
Assuntos: Atomic shadowing ; Atomic structure ; Boundaries ; Columns (structural) ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Defects and impurities in crystals; microstructure ; Deposition ; Deposition by sputtering ; Diffusion ; Exact sciences and technology ; Glancing angle deposition ; Grains ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Microscopic defects (voids, inclusions, etc.) ; Microstructure ; Physical vapor deposition ; Physics ; Structure and morphology; thickness ; Structure of solids and liquids; crystallography ; Structure zone model ; Surface diffusion ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Theory and models of film growth ; Thin film structure and morphology ; Thin films ; Whisker
É parte de: Thin solid films, 2013-01, Vol.527, p.158-163
Notas: ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
Descrição: Previously reported data on the microstructure of glancing angle deposited (GLAD) metal layers is used to extend the qualitative arguments of the structure zone model for physical vapor deposition to growth conditions with exacerbated atomic shadowing. At low growth temperatures Ts relative to the melting point Tm, the microstructural development is governed by atomic shadowing for both normal deposition and GLAD, resulting in fibrous grains with voided boundaries (Zone I). As the homologous growth temperature θ=Ts/Tm is raised above approximately 0.3, GLAD layers continue to exhibit well separated columns while conventional thin films show dense columnar microstructures (Zone II). θ>0.5 leads to equiaxed grains independent of deposition angle (Zone III). Therefore, strong shadowing during GLAD suppresses Zone II microstructures, causing a direct transition from Zone I to Zone III. GLAD microstructures can be divided into four distinct zones: rods, columns, protrusions, and equiaxed grains: separated self-affine rods form for θ<θc=0.24±0.2, while considerably broader columns develop at θ>θc, due to exacerbated self-shadowing associated with an increased growth front roughness, causing larger growth exponents. Above θ≈0.35, protrusions develop on top of some columns as they capture an overproportionate amount of deposition flux and grow much higher than the surrounding layer. At θ>0.5, diffusion processes dominate over atomic shadowing, leading to faceted rough layers with equiaxed grains. In addition, the large mass transport facilitates the formation of whiskers that form for many metal GLAD layers at θ>0.4. ► Microstructures of glancing angle deposited (GLAD) layers are categorized. ► The microstructure changes qualitatively with increasing homologous temperature. ► Of key importance is the competition between surface diffusion and atomic shadowing. ► GLAD yields a direct transition from Zone I to Zone III of the structure zone model. ► Transitions from rods to columns to protrusions to equiaxed grains with whiskers
Editor: Amsterdam: Elsevier B.V
Idioma: Inglês

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Structure zone model for extreme shadowing conditions

Mukherjee, S. ; Gall, D.

Amsterdam: Elsevier B.V

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