Influence of the Design Features of a Magnetron Sputtering Deposition System on the Electrical and Optical Properties of Indium—Tin Oxide Films
Kudriashov, D. A. ; Maksimova, A. A. ; Vyacheslavova, E. A. ; Uvarov, A. V. ; Morozov, I. A. ; Baranov, A. I. ; Monastyrenko, A. O. ; Gudovskikh, A. S.
Semiconductors (Woodbury, N.Y.), 2021-04, Vol.55 (4), p.410-414 [Periódico revisado por pares]Moscow: Pleiades Publishing
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