Aluminum scandium nitride films for piezoelectric transduction into silicon at gigahertz frequencies

Hackett, L. ; Miller, M. ; Beaucejour, R. ; Nordquist, C. M. ; Taylor, J. C. ; Santillan, S. ; Olsson, R. H. ; Eichenfield, M.

Applied physics letters, 2023-08, Vol.123 (7) [Periódico revisado por pares]

Melville: American Institute of Physics

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