Investigation of strain and stoichiometry of epitaxial titanium nitride on sapphire

Smith, H.A. ; Elhamri, S. ; Eyink, K.G. ; Biegler, Z.J. ; Adams, R.L. ; Mahalingam, K. ; Back, T.C. ; Urbas, A.M. ; Reed, A.N.

Thin solid films, 2020-03, Vol.697, p.137832, Article 137832 [Periódico revisado por pares]

Elsevier B.V

Texto completo disponível