On the Quenching of Electron Temperature in Inductively Coupled Plasma
Seong, Inho ; Kim, Si-Jun ; Lee, Youngseok ; Cho, Chulhee ; Jeong, Wonnyoung ; You, Yebin ; Choi, Minsu ; Choi, Byeongyeop ; You, Shinjae
Materials, 2023-04, Vol.16 (8), p.3219 [Periódico revisado por pares]Switzerland: MDPI AG
Texto completo disponível