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(001)-textured growth of diamond films on polycrystalline diamond substrates by bias-assisted chemical vapor deposition

Zhang, W.J. ; Jiang, X. ; Klages, C.-P.

Journal of crystal growth, 1997-02, Vol.171 (3), p.485-492 [Periódico revisado por pares]

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Título:
(001)-textured growth of diamond films on polycrystalline diamond substrates by bias-assisted chemical vapor deposition
Autor: Zhang, W.J. ; Jiang, X. ; Klages, C.-P.
Assuntos: Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Physics
É parte de: Journal of crystal growth, 1997-02, Vol.171 (3), p.485-492
Descrição: (001)-textured diamond films were deposited on as-grown polycrystalline and polished polycrystalline diamond substrates by means of bias-assisted chemical vapor deposition (CVD). Scanning electron microscopy (SEM) and Raman scattering were carried out to investigate the morphology and phase purity before and after the growth process. It is observed that an in-plane oriented diamond domain can be formed on a diamond face with undefined crystal direction. The roughness of the substrate will affect the morphology of the top layer. The mechanism for (001)-textured growth during bias-assisted process is discussed.
Editor: Amsterdam: Elsevier B.V
Idioma: Inglês

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