Self-organization during growth of ZrN/SiNx multilayers by epitaxial lateral overgrowth
Fallqvist, A. ; Ghafoor, N. ; Fager, H. ; Hultman, L. ; Persson, P. O. Å.
Journal of applied physics, 2013-12, Vol.114 (22) [Periódico revisado por pares]Melville: American Institute of Physics
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