Development of C/SiN Hybrid Sealing-Film for Environmental-Cell Window

Kawasaki, T ; Miura, T ; Cui, Z ; Tsutsui, H ; Matsutani, H ; Tanji, T

Microscopy and microanalysis, 2011-07, Vol.17 (S2), p.534-535 [Periódico revisado por pares]

New York, USA: Cambridge University Press

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