In situ measurements of the channeling dependence of ion-beam-induced recrystallization in silicon

Azevedo, G.de M. ; Williams, J.S. ; Young, I.M. ; Conway, M.J. ; Kinomura, A.

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2002-05, Vol.190 (1), p.772-776 [Periódico revisado por pares]

Elsevier B.V

Texto completo disponível