A CNN-Based Transfer Learning Method for Defect Classification in Semiconductor Manufacturing
Imoto, Kazunori ; Nakai, Tomohiro ; Ike, Tsukasa ; Haruki, Kosuke ; Sato, Yoshiyuki
IEEE transactions on semiconductor manufacturing, 2019-11, Vol.32 (4), p.455-459 [Periódico revisado por pares]New York: IEEE
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