RBS/Channelinc and Tem Analysis of Thin Sandwiched EPI-Layers of Germanium on Silicon

Swanson, M.L. ; Parikh, N.R. ; Frey, E.C. ; Sandhu, G.S. ; Chu, W.K. ; Baribeau Kechang, J.-M. ; Mccaffrey, J. ; Jackman, T.E.

MRS proceedings, 1988, Vol.138, Article 581

New York, USA: Cambridge University Press

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