Characterization of Gas Permeable Template Material for Nanoimprinting
Sugino, Naoto ; Takei, Satoshi ; Nakajima, Shinya ; Hanabata, Makoto ; Kameda, Takao ; Sekiguchi, Atsushi
Journal of Photopolymer Science and Technology, 2017/06/26, Vol.30(3), pp.275-280Hiratsuka: The Society of Photopolymer Science and Technology(SPST)
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