Three-dimensional Visualization of Scratch-Induced Subsurface Damage in TiSiN/TiN Multilayer Coating Using Focused Ion Beam-Scanning Electron Microscopic Tomography Technique

Wo, Pui Ching ; Munroe, Paul R. ; Xie, Zonghan ; Zhou, Zhifeng ; Li, Kwok Yan

Journal of the American Ceramic Society, 2011-05, Vol.94 (5), p.1598-1604 [Periódico revisado por pares]

Malden, USA: Blackwell Publishing Inc

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