Vacancy-type defects induced by grinding of Si wafers studied by monoenergetic positron beams
Uedono, Akira ; Mizushima, Yoriko ; Kim, Youngsuk ; Nakamura, Tomoji ; Ohba, Takayuki ; Yoshihara, Nakaaki ; Oshima, Nagayasu ; Suzuki, Ryoichi
Journal of applied physics, 2014-10, Vol.116 (13), p.134501 [Periódico revisado por pares]Melville: American Institute of Physics
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