Structural and electrical properties of SiGe-on-insulator substrates fabricated by direct bonding

Grekhov, I. V. ; Kostina, L. S. ; Argunova, T. S. ; Belyakova, E. I. ; Rozkov, A. V. ; Shmidt, N. M. ; Yusupova, Sh. A. ; Je, J. H.

Semiconductors (Woodbury, N.Y.), 2010-08, Vol.44 (8), p.1101-1105 [Periódico revisado por pares]

Dordrecht: SP MAIK Nauka/Interperiodica

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