Atomic force microscopy used for surface finish inspection of diamond turned monocrystalline silicon
Renato Goulart Jasinevicius Jaime Gilberto Duduch; Arthur José Vieira Porto; euspen Topical Conference on Fabrication and Metrology in Nanotechnology (1. 2000 Copenhagen)
Proceedings Copenhagen, Denmark: Technical University of Denmark, 2000Copenhagen, Denmark Technical University of Denmark 2000
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