Idioma:

Jet molding system for realization of three-dimensional micro-structures

Akedo, J. ; Ichiki, M. ; Kikuchi, K. ; Maeda, R.

Sensors and actuators. A. Physical., 1998-06, Vol.69 (1), p.106-112 [Periódico revisado por pares]

Lausanne: Elsevier B.V

Texto completo disponível

Citações Citado por

Enviar para

Título:
Jet molding system for realization of three-dimensional micro-structures
Autor: Akedo, J. ; Ichiki, M. ; Kikuchi, K. ; Maeda, R.
Assuntos: Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Cross-disciplinary physics: materials science; rheology ; Electron and ion emission by liquids and solids; impact phenomena ; Exact sciences and technology ; Excimer-laser ablation ; Forming; molding, extrusion etc ; Fundamental areas of phenomenology (including applications) ; Gas lasers including excimer and metal-vapor lasers ; Impact phenomena (including electron spectra and sputtering) ; Jet molding system ; Laser-beam impact phenomena ; Lasers ; Mask-deposition ; Materials science ; Materials synthesis; materials processing ; Microfabrication ; Optics ; Physics ; PZT ; Ultrafine particles
É parte de: Sensors and actuators. A. Physical., 1998-06, Vol.69 (1), p.106-112
Descrição: We have developed a fabrication technology for realization of three-dimensional microstmctures composed of different materials using excimer laser ablation and ultrafine particle (UFP) jet molding. We have named this technology the jet molding system (JMS). This method enables the production of three-dimensional microdevices composed of actuator, sensor materials (PZT), and electrodes (metal). Insertmolding and mask-deposition methods were applied to obtain these structures. SEM observation as well as density and electrical property measurements showed good pattern transfer fidelity with sufficient deposited layer quality (density of better than 85%, dielectric constant of deposited PZT layer of 760). The deposition rate of PZT was much faster than that obtained using any other deposition technique, and a PZT layer up to 40 μm of thick was formed with the desired metal electrode structure.
Editor: Lausanne: Elsevier B.V
Idioma: Inglês

Links

View record in Pascal Francis

Voltar para lista de resultados

Realização: Logos de Redes Sociais:

Jet molding system for realization of three-dimensional micro-structures

Akedo, J. ; Ichiki, M. ; Kikuchi, K. ; Maeda, R.

Lausanne: Elsevier B.V

Buscando em bases de dados remotas. Favor aguardar.