Comparison of the structural properties of the PECVD SIOXNY dielectric layer with the interface electrical properties in SI/SIOXNY/AL capacitors
Katia Franklin Albertin Márcia Carvalho de Abreu Fantini; Inés Pereyra 1947-; Encontro da SBPMat (3. 2004 Foz do Iguaçu)
Program São Carlos: SBPMat, 2004São Carlos SBPMat 2004
Acesso online