Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films

Miller, J. ; Ceballos, A. ; Bayu Aji, L.B. ; Moore, A. ; Wasz, C. ; Kucheyev, S.O. ; Elhadj, S. ; Falabella, S.

Thin solid films, 2020-11, Vol.714 (na), p.138394, Article 138394 [Periódico revisado por pares]

United States: Elsevier B.V

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