Effect of high-temperature postannealing atmosphere on the properties of BaSi2 films

Iwai, Ai ; Aonuki, Sho ; Narita, Shunsuke ; Takayanagi, Kaori ; Toko, Kaoru ; Suemasu, Takashi

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-05, Vol.42 (3) [Periódico revisado por pares]

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