Electron Density and Electron Temperature Control with a Magnetic Field and a Grid in Inductively Coupled Argon Plasma

He, Yun-peng ; Jin, Wei ; Wang, Yi-bo ; Lv, Shao-bo ; Wang, Rui-sheng ; Liu, Jun-qi ; Liu, Hai-cheng

Plasma chemistry and plasma processing, 2023, Vol.43 (1), p.381-400 [Periódico revisado por pares]

New York: Springer US

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