Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering

Fu, Yuwei ; Ji, Peng ; He, Mengsha ; Huang, Peijun ; Huang, Guobin ; Huang, Weihua

Plasma chemistry and plasma processing, 2024, Vol.44 (1), p.601-619 [Periódico revisado por pares]

New York: Springer US

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