Optimization of fabrication processes for Nb, NbN, NbTiN films and high-quality tunnel junctions for terahertz receiving circuits

A.M. Chekushkin ; L.V. Filippenko ; A.A. Lomov ; Liu Dong ; Shi Sheng-Cai ; V.P. Koshelets

Technical Physics, 2022, Vol.92 (13), p.2136 [Periódico revisado por pares]

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