Hydrogen and nitrogen incorporation in ZnO thin films grown by radio-frequency (RF) sputtering
EISERMANN, S ; KRONENBERGER, A ; DIETRICH, M ; PETZNICK, S ; LAUFER, A ; POLITY, A ; MEYER, B. K
Thin solid films, 2010, Vol.518 (4), p.1099-1102 [Periódico revisado por pares]Amsterdam: Elsevier
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