He-induced cavity formation in silicon upon high-temperature implantation

Fichtner, P.F.P ; Peeva, A ; Behar, M ; M. Azevedo, G.de ; Maltez, R.L ; Koegler, R ; Skorupa, W

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2000-03, Vol.161, p.1038-1042 [Periódico revisado por pares]

Elsevier B.V

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